Rubicon Technology has placed an order of multiple units of the Zeta 300 series optical profiler from San Jose based Zeta Instruments for its sapphire substrate and wafer production.
The company will use the Zeta-300 series optical profilers for inspection and metrology of sapphire substrates to help improve wafer yield and lower costs for their LED customers.
Zeta 300 optical profiler
Zeta's novel high-precision metrology systems have gained strong traction across the LED industry for cost-effective advanced functionality. The latest Zeta-300 series was designed to address the stringent specifications of the Patterned Sapphire Substrate (PSS) market. It combines PSS metrology and defect review in a system that is unique in the sapphire industry, enabling detailed measurement of PSS structure dimensions as well as wafer defect inspection on the same system.
The Zeta-300 series leverages Zeta’s patented Z-Dot technology to deliver high repeatability and accuracy for the measurement of LED-patterned/etched substrates, photo-resist and stacked structures on transparent surfaces. Regarded as having one of the best optics and algorithm combinations, these profilers provide rapid and reliable data acquisition and analysis. In side-to-side comparisons with competitive offerings the Zeta-300 series is claimed to consistently deliver the highest repeatability and accuracy for PSS measurements in the LED industry.
In addition, coupled with application-specific software and a companion automated wafer handler, the Zeta-380 provides imaging and measurement capabilities superior to those of laser confocal microscopes. The Zeta-380 measures and detects defects falling outside the industry certification levels that may not be detected by competing offerings. Zeta’s intuitive and innovative system design also offers a greater ease of use while lowering overall cost of ownership.