LayTec in-situ metrology in AIXTRON’s latest AIX R6 HB-LED reactor

On November 6th AIXTRON presented its latest generation of MOCVD reactors for HB-LED manufacturing at the SSL China conference. The advanced feed-back control capabilities of these reactors are based on two fully integrated LayTec OEM metrology sub-systems (Inside MiniR and Inside TTC) with typically seven metrology heads in total. Emissivity corrected susceptor surface temperature and double wavelength reflectance is provided by the industry proven LayTec in-situ metrology. As additional options also wafer bow and GaN surface temperature can be measured by Inside MiniRC and Inside P400 (OEM version of LayTec’s Pyro 400).

Aixtron’s and LayTec’s engineering teams worked closely together in order to provide this market leading in-situ metrology solution for both our customers in the LED industry.

AIX R6 HB-LED reactor with LayTay's Inside MiniR and Inside TTC sub-systems. (LayTec/LEDinside)

 

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