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Home > News > China SemiLEDs Place an Order for Novellus’s VECTOR(R) LED System
July.1, 2011 - 08:50 — jasminezhuang
  

China SemiLEDs Place an Order for Novellus’s VECTOR(R) LED System

LED equipment manufacturer Novellus Systems has shipped a VECTOR(R) plasma-enhanced chemical vapor deposition (PECVD) system to Xurui Guangdian Co., Ltd. ("China SemiLEDs") for producting SemiLEDs' MvpLED(TM) high-efficiency LED products.

With a multi-wafer carrier configuration, the VECTOR LED system can handle all wafer sizes -- 2", 3", 4", 6", 8" and 12" -- with exceptional throughput, film quality and uniformity at each size.

In contrast to a traditional PECVD reactor used in LED manufacturing, the VECTOR LED also deposits films at lower temperatures, provides better manufacturing process control and is more energy-efficient.
 
The new VECTOR will be installed at the China SemiLEDs' plant in Foshan, China.

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