Aixtron CRIUS II-L Sets a New Benchmark for MOCVD Reactor

Currently, with the introduction of the new CRIUS II-L, which Aixtron considers as  the world's largest capacity MOCVD reactor,the company sets a new benchmark for MOCVD reactor capacity, throughput and LED production cost.

the new Aixtron CRIUS II-L is based on the already market proven CRIUS II platform which was introduced in 2010,and it’s now available with a 16x4 inch or 69x2 inch capacity.

As with previous generations, the CRIUS II-L reactor is based on the Close Coupled Showerhead (CCS) concept, which as a key-enabling technology has a well proven track record in being easily scalable with a seamless and short process transfer.
 

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