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2019-07-18

UnitySC Introduces Phase Shift Deflectometry Technology for Detecting Invisible Topographic Defects on GaAs Wafer for VCSEL

Unity Semiconductor (UnitySC), the France-based semiconductor inspection solution provider, announced that it has demonstrate the capability of detecting topographic defects on GaAs wafers for VCSEL in LiDAR and 3D recognition applications. On top of common Surface Scanning Inspection Systems (SSIS) and Automatic Optical Inspection (AOI) systems, UnitySC noted that it is able to find out defects that are not visible on standard optical inspection systems. These defects do not scatter or absorb light, and can only be revealed by their topography but the...

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