Samsung Sets up New Record on Nitride LEDs on 200 mm Silicon

Reportedly, Samsung Advanced Institute of Science and Technology (SAIT)  has set up a new record of manufacturing nitride LEDs on 200 mm silicon.

Instead of sapphire,with this platform, the widely used substrate for making LEDs promises to cut the cost of LED deposition and processing.


Growth of high-quality GaN layers on silicon is not easy,because of  differences in both the lattice constant and the thermal coefficient of expansion of the two materials.

SAIT has addressed both these issues by creating a crack-free template featuring AlN/AlGaN buffer layers, intermediate layers and an n-type GaN layer.

On this template engineers have created an LED structure featuring five quantum wells and a p-type AlGaN electron blocking layer. Photoluminescence (PL) mapping of this epiwafer produced an average emission wavelength of 429.5 nm, with a standard deviation of 10.3 nm.

Temperature-dependent PL measurements suggest that the internal quantum efficiency of the LEDs is 65 percent.

The research team have also employed a substrate transfer technique to fabricate vertical-LED chips from 8-inch epiwafers.

SAIT released a paper to describe the method used to produce LED epi-structures with an internal quantum efficiency of 65 percent at the ninth International Conference on Nitride Semiconductors (ICNS).

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