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Home > AGHeatpulse RTP system
2015-07-13

OEM Group Receives AGHeatpulse RTP System Order From Leading LED Manufacturer

Global semiconductor capital equipment manufacturer OEM Group announced today that a leading maker of LED products has placed a repeat order for an AGHeatpulse® RTP system. The system will be used for annealing gallium-nitride (GaN) films deposited on 150mm sapphire substrates, one of the critical process steps needed in advanced LED fabrication. This repeat order validates again the AGHeatpulse® RTP system's demonstrated capabilities meeting the exacting thermal requirements of new LED manufacturing technologies, and supports the LED industry's move from batch processing of smaller diameter sapphire substrates to single wafer processing of 150mm sapphire substrates.
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