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Home > Tokuyama
2009-11-12

Tokuyama Expands UV-LED Production Capacity with AIXTRON MOCVD System

AIXTRON AG announced that a further AIX 200/4 RF-S MOCVD system has been installed and successfully started operation at Tokuyama R&D center in Tsukuba, Japan. The reactor has already been shipped in the fourth quarter of 2008 and is being used by Tokuyama for the development of AlGaN-based ultra-violet light emitting diodes (UV-LEDs).
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