LayTec Announces OEM Partnership with Evatec Ltd.

LayTec is happy to announce to have signed a strategic OEM agreement with Evatec Ltd. (Switzerland, – a leading supplier of thin film deposition systems to semiconductor and optics. LayTec will equip Evatec with high precision in-situ metrology tools for versatile process control. Evatec’s evaporation, sputter and PECVD systems find their applications in the MEMs, optoelectronics, precision optics as well as semiconductor markets.

The OEM partnership enables an ongoing close cooperation for integration of advanced in-situ metrology in Evatec’s reactors. LayTec’s metrology tool EpiCurve® TT is already successfully applied on Evatec sputter systems for stress management of metal multi-layers for opto-electronic. EpiCurve® TT enables strain-engineering of the multi-layer structures by real-time tuning of the sputter parameters! The results were presented at CS International Conference in March 2013.

Evatec’s Senior Process Engineer Silvia Schwyn Thöny commented: “With LayTec’s state-of-the-art in-situ metrology we are able to meet the growing demands on precise process control and optimization, which is the key to high yields and low costs.”

“For LayTec, an OEM cooperation with Evatec is of strategic importance”, said LayTec‘s CEO Dr. Thomas Zettler. “It will enable implementation of our metrology into processes beyond LayTec’s established applications. And when Swiss precision meets German quality standards, the expectations can never be too high.”

LayTec develops and manufactures integrated in-situ and in-line metrology for thin-film deposition and other high value generating processes. Currently, the company has more than 1500 metrology systems installed worldwide and offers a global customer support and service network including local representations.

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