University of California Research Center Adopts TNSC's MOCVD Reator for DUV LED

Matheson Tri-Gas, Inc., together with its parent company, Taiyo Nippon Sanso Corporation (TNSC), has announced that the Solid State Lighting & Energy Electronics Center (SSLEEC), the world renowned research center at the University of California, Santa Barbara, installed an SR-4000HT grade gallium nitride (GaN) metal organic chemical vapor deposition (MOCVD) reactor for its continued compound semiconductor device developmental work for UVCLED. SSLEEC is co-directed by Nobel Prize-winning Professor Shuji Nakamura and Professor Steven DenBaars.

The unique design of the SR-4000HT assists in growing high-aluminum content devices at high growth rates, while operating at higher than 40kPa pressures and elevated temperatures.

According to Professor Nakamura, “We have already obtained preliminary growth results which demonstrate the unrivaled performance of the SR-4000HT reactor. Our students and faculty members are very excited by these results.  We look forward to using the MOCVD reactor from TNSC to grow the high quality III-Nitride-based materials and devices.”

Koh Matsumoto, (CSE Division Manager, TNSC) stated, “We are proud that UCSB has chosen our reactor for their advanced research. We believe that the designed features of our reactor, which enable well-controlled vapor phase reactions, will allow UCSB to enjoy a large process window to develop their devices.”

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