Veeco announced that Nantong Tongfang Semiconductor Co., Ltd. has received shipment of Veeco's TurboDisc® K465i™ MOCVD System for research of GaN-on-Si HB LEDs. The system was delivered to Tongfang’s new LED Technology Center in Nantong, China.
Professor Liu Gang, General Manager of Nantong Tongfang Semiconductor, stated, “We successfully utilize Veeco’s MOCVD systems in our current production of GaN-on-sapphire based LEDs. It was the logical choice to select Veeco for our new research into GaN-on-Si based LED devices. This is going to be a significant focus of our future R&D investment over the next few years.”
Jeff Hawthorne, Veeco’s Senior Vice President, MOCVD, commented, "Many of our LED customers are developing GaN-on-Si technology, which offers the potential to accelerate the adoption of solid-state lighting by reducing the cost of making LEDs without compromising end-product quality. We are glad to support Tongfang in their research efforts.”
The K465i features film quality and low defects, which are key for GaN-on-Si processing. It also incorporates Veeco's Uniform FlowFlange® technology for superior uniformity and excellent run-to-run repeatability. Low maintenance TurboDisc technology enables highest system availability, excellent particle performance and high throughput. The production-proven K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance.
