Veeco’s MOCVD system has been approved by Epistar

Veeco Instruments Inc., announced Epistar Corporation of Taiwan has qualified Veeco's TurboDisc(R) K465i(TM) gallium nitride (GaN) Metal Organic Chemical Vapor Deposition (MOCVD) System for high volume LED production.

According to Dr. M.J. Jou, President of Epistar, comment, Veeco enabled Epistar to qualify the K465i rapidly and it provides the automation required to produce highly uniform LEDs with minimal downtime. The K465i provides Epistar the ease-of-use and system availability to meet their growing production requirements.

Bill Miller, Ph.D., Senior Vice President, General Manager of Veeco's MOCVD Operations commented that as a result of this successful qualification, they currently expect to ship a significant number of tools to Epistar this year. This is an important milestone for Veeco as they continue to build Taiwan installed base.

With superior wavelength uniformity and excellent run-to-run repeatability, the production-proven K465i extends Veeco's lead in capital efficiency - the number of good wafers per day for each capital dollar - for high volume LED manufacturers. The K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance.

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