LED equipment manufacturer Novellus Systems has shipped a VECTOR(R) plasma-enhanced chemical vapor deposition (PECVD) system to Xurui Guangdian Co., Ltd. ("China SemiLEDs") for producting SemiLEDs' MvpLED(TM) high-efficiency LED products. With a multi-wafer carrier configuration, the VECTOR LED system can handle all wafer sizes -- 2", 3", 4", 6", 8" and 12" -- with exceptional throughput, film quality and uniformity at each size. In contrast to a traditional PECVD reactor used in LED m...