USHIO America, a wholly owned subsidiary of USHIO Inc, has kicked off marketing the world's first 6-inch full-field projection exposure system for manufacturing LED chips in the US.

USHIO developed its new exposure system — model UX4-LEDs —that allows full-field exposure of 6-inch wafers while preventing wafer warpage or distortion, achieving a throughput enhancement of 300% compared with conventional stepper systems.

The UX4-LEDs exposure system is based on the same platform as USHIO's field-proven UX series full-field projection exposure systems for semiconductors, FPDs, printed-circuit boards and MEMS.

Therefore, USHIO's full-field projection exposure systems can satisfy to the demand of enhancing productivity and reducing manufacturing cost by increasing the number of chips produced from each wafer for LED chip manufacturers.

So far, USHIO already has installed more than 1,000 units of the UX series systems throughout the world.