Veeco, Allos Successfully Demo GaN-on-Si Wafer for Blue and Green Micro LED

Veeco Instruments completed a strategic initiative with ALLOS Semiconductors (ALLOS) to demonstrate 200mm GaN-on-Si wafers for Blue/Green microLED production. Veeco teamed up with ALLOS to transfer their proprietary epitaxy technology onto the Propel SingleWafer MOCVD System to enable micro-LED production on existing silicon production lines. 

(Image: Micro LED Adafruit Industries via Flickr CC2.0)

“With the Propel reactor, we have an MOCVD technology that is capable of high yielding GaN Epitaxy that meets all the requirements for processing micro-LED devices in 200 millimeter silicon production lines,” said Burkhard Slischka, CEO of ALLOS Semiconductors. “Within one month we established our technology on Propel and have achieved crack-free, meltback-free wafers with less than 30 micrometers bow, high crystal quality, superior thickness uniformity and wavelength uniformity of less than one nanometer.  Together with Veeco, ALLOS is looking forward to making this technology more widely available to the micro-LED ecosystem.” 

Micro-LED display technology consists of <30x30 square micron red, green, blue (RGB) inorganic LEDs that are transferred to the display backplane to form sub-pixels. Direct emission from these high efficiency LEDs offers lower power consumption compared with OLED and LCD while providing superior brightness and contrast for mobile displays, TV and wearables. The manufacturing of micro-LEDs requires high quality, uniform epitaxial wafers to meet the display yield and cost targets.   

“In contrast to competing MOCVD platforms, Propel offers leading-edge uniformity and simultaneously achieves excellent film quality as a result of the wide process window afforded by Veeco’s TurboDisc technology,” said Peo Hansson, Ph.D., Senior Vice President and General Manager of Veeco MOCVD Operations. “Combining Veeco’s leading MOCVD expertise with ALLOS’ GaN-on-Silicon epi-wafer technology enables our customers to develop micro-LEDs cost effectively for new applications in new markets.”  

Disclaimers of Warranties
1. The website does not warrant the following:
1.1 The services from the website meets your requirement;
1.2 The accuracy, completeness, or timeliness of the service;
1.3 The accuracy, reliability of conclusions drawn from using the service;
1.4 The accuracy, completeness, or timeliness, or security of any information that you download from the website
2. The services provided by the website is intended for your reference only. The website shall be not be responsible for investment decisions, damages, or other losses resulting from use of the website or the information contained therein<
Proprietary Rights
You may not reproduce, modify, create derivative works from, display, perform, publish, distribute, disseminate, broadcast or circulate to any third party, any materials contained on the services without the express prior written consent of the website or its legal owner.

Luminus Devices, Inc., a manufacturer of high-performance LEDs and solid-state light sources, has expanded its horticulture LED portfolio with new SST-20 series white LEDs to complement the extensive range of discrete wavelengths from UVA (365... READ MORE

The significant drop in light output (green gap phenomenon) exhibited by green LEDs has often been the cause of efficiency problems and high costs in customer applications. For its indium gallium nitride (InGaN)-based green LEDs, Osram Opto Se... READ MORE