The UK’s Oxford Instruments Plasma Technology, a supplier of plasma etch and deposition high-volume manufacturing (HVM) solutions, has had its remote-plasma atomic layer deposition (ALD) nitride passivation solution qualified for full production by a US-based power electronics manufacturer of gallium nitride (GaN) devices, supporting the first phase of its ramp. GaN-based devices are now well established in the consumer market, with a wide range of rapid chargers available commercially to support mobile devices. Fast charging and a smaller footprint are among the...

ESPOO, Finland, April 13, 2021 /PRNewswire/ -- Picosun Group has proved to significantly increase the production efficiency of its LED and OLED customers with the PICOSUN® P-300BV ALD system. Recent tests show that a reduced ALD process cycle time and an increased number of wafers deposited with the same film thickness resulted in almost 100% better throughput. A throughput of over 20 000 wafers per month can be reached with a wafer batch of 100 wafers*. At the same time, the process quality in terms of film thickness uniformity has remained on an...