2012-07-03

Edwards Announces New Vacuum Pump for LED and Compound Semiconductor Manufacturing

New iXH645H dry vacuum pump requires minimal maintenance and maximizes uptime in harsh manufacturing environments Edwards (NASDAQ: EVAC), a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services, today introduced the new iXH645H dry pump. The new pump has been optimized for MOCVD processes used in LED manufacturing, as well as for compound semiconductor manufacturing using III-V materials in gate stacks. The iXH645H delivers very high gas flow capability and is able to operate c...
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