LayTec in-situ metrology in AIXTRON’s latest AIX R6 HB-LED reactor

On November 6th AIXTRON presented its latest generation of MOCVD reactors for HB-LED manufacturing at the SSL China conference. The advanced feed-back control capabilities of these reactors are based on two fully integrated LayTec OEM metrology sub-systems (Inside MiniR and Inside TTC) with typically seven metrology heads in total. Emissivity corrected susceptor surface temperature and double wavelength reflectance is provided by the industry proven LayTec in-situ metrology. As additional options also wafer bow and GaN surface temperature can be measured by Inside MiniRC and Inside P400 (OEM version of LayTec’s Pyro 400).

Aixtron’s and LayTec’s engineering teams worked closely together in order to provide this market leading in-situ metrology solution for both our customers in the LED industry.

AIX R6 HB-LED reactor with LayTay's Inside MiniR and Inside TTC sub-systems. (LayTec/LEDinside)

[Editorial Note: LEDinside is not responsible for the contents in the press releases submitted to us by manufacturers nor sale of products. Please contact manufacturers directly if you have any inquiries regarding their products or press release content.]

Disclaimers of Warranties
1. The website does not warrant the following:
1.1 The services from the website meets your requirement;
1.2 The accuracy, completeness, or timeliness of the service;
1.3 The accuracy, reliability of conclusions drawn from using the service;
1.4 The accuracy, completeness, or timeliness, or security of any information that you download from the website
2. The services provided by the website is intended for your reference only. The website shall be not be responsible for investment decisions, damages, or other losses resulting from use of the website or the information contained therein<

Proprietary Rights
You may not reproduce, modify, create derivative works from, display, perform, publish, distribute, disseminate, broadcast or circulate to any third party, any materials contained on the services without the express prior written consent of the website or its legal owner.