Oxford Instruments Partners ITRI for Micro LED Development with Plasma Etch Solutions

Oxford Instruments Plasma Technology (OIPT) announced that it has worked with Taiwan’s Industrial Technology Research Institute (ITRI) by providing multiple PlasmaPro 100 systems including both etch and deposition for ITRI’s Micro LED R&D program.

The PlasmaPro 100 ICP process solutions are designed to support leading edge device applications such as Lasers, RF, Power and advanced LEDs.

ITRI has been developing Micro LED technology since 2009. In 2018, with the cooperation with Macroblock, Unimicron and PlayNitride, ITRI has exhibited a Micro LED module at COMPUTEX. The institute is also working in Micro LED development for AR applications.

Dr Fang, Deputy Division Director, Electronics and Optoelectronics System Research Laboratories commented, “ITRI has a close collaboration with Oxford Instruments due to their cutting edge technology but this is not the only reason we chose them to supply our latest system. Their application solutions, unrivalled local process support and their capability to nurture laboratory developments into production standards with our industrial partners were key influences in our purchase decision.”

We are thrilled that ITRI have chosen to partner with OIPT in the next exciting phase of development of LEDs with this development program for Micro LEDs similar to those used to demonstrate Samsung’s Wall TV”, stated Robert Gunn, Strategic Marketing Manager at OIPT. “ITRI is the latest to join many research institutes and start-up companies in adopting OIPT process solutions for this rapidly growing market.

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