AIXTRON Delivers MOCVD System to Japan’s Nagoya University for GaN-based Deep UV Optoelectronic Devices

German semiconductor equipment provider AIXTRON announced its partnership with Nagoya University in Japan. The equipment maker has delivered a Close Coupled Showerhead® (CCS) system to the University’s Institute of Materials and Systems for Sustainability (IMaSS).

AIXTRONs 3x2-inch Flip Top CCS MOCVD platform is intended for research in the field of GaN-based deep ultra-violet (DUV) optoelectronic devices. Specially designed for research and small series production, the AIXTRON system enables real scaling from R&D to large series production. The Close Coupled Showerhead concept inherently allows an extremely uniform and reproducible deposition of various complex, mostly single crystal materials.

"In addition to its excellent technical performance, our Closed Coupled Showerhead® Flip Top Reactor is characterized by its easy maintenance and lowest running cost. The system is one of the most successful AIXTRON products as proven by numerous orders from universities, laboratories and other research institutions worldwide. We are looking forward to closely cooperate with Nagoya University and its renowned IMaSS," comments Dr. Bernd Schulte, President of AIXTRON SE.

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