McGill University Chooses Veeco Instruments Multi-Chamber MBE System

Veeco Instruments announced that McGill University in Montréal, Québec, Canada has ordered Veeco’s new GENxplor™ R&D Molecular Beam Epitaxy (MBE) System for their Electrical and Computer Engineering Department, as part of a research grant from Canada’s Foundation for Innovation.  The Veeco GENxplor is a fully integrated system that deposits high quality epitaxial layers on substrates up to 3” in diameter and is ideal for cutting edge compound semiconductor research on a wide variety of materials including arsenides, nitrides and oxides.

The GENxplor will be used by Dr. Zetian Mi and his team for the development of nitride materials in light emitting and power electronic devices. Nitride materials have demonstrated significant advantages over traditional silicon-based power electronics devices using high power and high temperatures. As a result, nitride materials are attracting investments to develop new devices and processes for this emerging market.

“We are excited about the impact that Dr. Mi and his team will have on the development of more efficient power electronic devices using Veeco’s new GENxplor,” commented Jim Northup, Vice President, General Manager for Veeco’s MBE Operations. “The GENxplor, currently nominated for a CS Industry 2014 award, has quickly become the R&D system of choice for leading research institutions. Its modular and flexible design allows multiple deposition chambers, which made it an ideal fit for McGill University.”

For more information about Dr. Mi’s research focus areas, please visit http://people.mcgill.ca/zetian.mi/. For more information on the Canada Foundation of Innovation, please visit http://www.innovation.ca/.

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